| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint template configured to make an imprint on an imprintable medium in an imprint lithography process. SOLUTION: The imprint template has a pattern with a pattern density corresponding to a volume of an imprintable medium used to substantially fill pattern features per unit area of the contact face of the imprint template, wherein contiguous regions in the pattern on the contact face of the imprint template have substantially the same pattern density, have a minimized difference of pattern densities, or have a pattern density difference kept smaller than a maximum limit. Furthermore, the contiguous regions individually exhibit different functions after being imprinted on a substrate. COPYRIGHT: (C)2007,JPO&INPIT
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