FILM-PATTERN SUBSTRATE, FILM-PATTERN FORMING METHOD, DEVICE MANUFACTURING METHOD, ELECTRO-OPTIC DEVICE, AND ELECTRONIC APPLIANCE

摘要

PROBLEM TO BE SOLVED: To provide a highly reliable thin-film wiring-pattern. SOLUTION: A film-pattern forming method has a process for forming a barrier plate B on a substrate P, a process for forming a first film-pattern 4a in an opening 2 partitioned by the barrier plate B, a process for removing the portions of the barrier plate B which are opposed respectively to the respective sides of the first film-pattern 4a, and a process for forming a second film-pattern 5 by its plating wherewith the respective sides and the upper portion of the first film-pattern 4a are covered. COPYRIGHT: (C)2007,JPO&INPIT