| 摘要 |
An etching apparatus for manufacturing a semiconductor device is provided to reduce a size of the etching apparatus by integrating an LCD(Liquid Crystal Display) monitor, a keyboard, and a track ball into one entity. An etching apparatus for manufacturing a semiconductor device includes a remote controller(100), a power supply(108), and a remote cable(110). The remote controller includes a monitor, a keyboard, and a track ball. A status of an etching process performed inside a chamber is displayed on the monitor. Operation data for the etching process are inputted by using the keyboard. A cursor is moved on the monitor by the track ball. The power supply supplies power to the remote controller. The remote cable couples a PC(Personal Computer) integrated system board on the etching apparatus with a data input terminal on the remote controller.
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