ROTARY TYPE EQUIPMENT FOR PICKING AND PLACING SEMICONDUCTOR DEVICE

摘要

A rotary type pick/place apparatus of a semiconductor device is provided to increase a manufacturing speed of the semiconductor device by quickly delivering the semiconductor device in a semiconductor manufacturing apparatus. A rotary type pick/place apparatus of a semiconductor device includes plural pickers(123), a rotary block(121), a frame(111), a rotation motor(140), and a main voltage driving cylinder(113). The pickers suck up semiconductor devices. The rotary block includes the pickers, which are arranged in plural columns. The columns are arranged on a circumference around a central axis. The rotary block is rotatably coupled with the frame. The rotation motor rotates the rotary block. The main voltage driving cylinder vertically drives the frame. A pitch converter changes pitches of the pickers on the same column.