| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide which can easily be manufactured by a duplication method, and moreover has a structure resistant to leaking of an internal optical signal from the core, and to provide a manufacturing method therefor. SOLUTION: A concave slot 3 for forming a core is formed on the upper surface of a cladding substrate 21. And on both sides of the concave slot 3, hollows 6 are formed via flat portions 5. An ultraviolet ray hardening type transparent resin 8 is applied onto the surface of the cladding substrate 2, thereafter the transparent resin 8 is pressed by a stamper 13. At this moment, a core 4 is formed in the concave slot 3 and excessive transparent resin 8 pressed between the stamper 13 and the flat portions 5 flows and escapes into the hollows 6, as a result, the transparent resin 8 can be made thin in a short time. The capacity of the hollows 6 is larger than that of the concave slot 3, and moreover the depth of the hollows 6 is deeper than that of the concave slot, and is 10μm or deeper. COPYRIGHT: (C)2007,JPO&INPIT |
