| 发明名称 |
MEMS DEVICE WITH FEEDBACK CONTROL |
| 摘要 |
A MEMS device includes at least one movable member and an active device having at least one property affected by the location of the movable member with respect to the active device. A control circuit is used to limit movement of the movable member based on observation of the property affected by the active device.
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| 申请公布号 |
US2006245034(A1) |
申请公布日期 |
2006.11.02 |
| 申请号 |
US20060278761 |
申请日期 |
2006.04.05 |
| 申请人 |
CHEN ZHIZHANG;LIAO HANG;RAMAMOORTHI SRIRAM;MYERS TIMOTHY F |
发明人 |
CHEN ZHIZHANG;LIAO HANG;RAMAMOORTHI SRIRAM;MYERS TIMOTHY F. |
| 分类号 |
G02B26/00 |
主分类号 |
G02B26/00 |
| 代理机构 |
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代理人 |
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