| 摘要 |
An apparatus for transferring a substrate is provided to equally pressurize both end portions of the substrate in a width direction of the substrate, thereby preventing the damage of the substrate during transfer of the substrate, by controlling upper mounting rollers to pressurize both end portions of the substrate. A plurality of transfer shafts(3) are disposed at a predetermined interval, and have shaft lines across the transfer direction of a substrate. Each of the transfer shafts has both end portions rotatively supported. A plurality of transfer rollers(21) are installed on the transfer shafts, and support the substrate except both ends. A plurality of end portion supporting rollers(22) are installed at the transfer shafts, and support both ends of the substrate. A pair of upper mounting roller shafts(25) are installed at both ends of each transfer shaft to have shaft lines parallel to the transfer shafts. Each of the upper mounting roller shafts has one end portion, which corresponds to both ends of the transfer shafts and is rotatively supported. A pair of upper mounting rollers(27) are installed at the other end of each upper mounting roller shaft, and pressurize an upper surface of both ends of the substrate. A weight(29) is installed at the upper mounting roller shafts, and controls the upper mounting rollers to pressurize the upper surface of the substrate. |
