发明名称 ADJUSTABLE MASK BLANK STRUCTURE FOR AN EUV PHASE-SHIFT MASK
摘要 <p>The invention relates to a method of forming an optical compound, consisting of: a) the formation of a multilayer stack (32, 34) comprising an adjustment layer (30) that is made from a metal/semiconductor mixture which is formed in or on the stack; b) the etching of part of the multilayer stack, including at least part of the adjustment layer; and c) an annealing step in order to contract the adjustment layer by less than 1 nm.</p>
申请公布号 WO2006114544(A1) 申请公布日期 2006.11.02
申请号 WO2006FR50380 申请日期 2006.04.24
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;QUESNEL, ETIENNE 发明人 QUESNEL, ETIENNE
分类号 G03F1/00 主分类号 G03F1/00
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