| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical device for equalizing and uniformizing intensity distribution in the plane of parallel light, and to provide a parallel light source apparatus using the optical device. <P>SOLUTION: The uniformizing optical device 40 has uniformizig elements 41<SB>2</SB>and 41<SB>2</SB>. The configuration of the uniformizing elements 41<SB>1</SB>and 41<SB>2</SB>is such that, where the direction in which incident light runs is Z direction and directions perpendicular to the Z direction and perpendicular to each other are X direction and Y direction, an incident face 44 and an emission face 45 which are perpendicular to the Z direction are provided. Additionally, two total reflection mirrors 42<SB>1</SB>and 42<SB>2</SB>are disposed apart from and parallel to each other at 45° relative to an X-Y plane and a Y-Z plane. Further, one or more semitransparent mirrors 43<SB>1</SB>to 43<SB>3</SB>are disposed between the total reflection mirrors 42<SB>1</SB>and 42<SB>2</SB>and between the incident face 44 and emission face 45 at predetermined intervals so as to be parallel to the total reflection mirrors 42<SB>1</SB>and 42<SB>2</SB>. <P>COPYRIGHT: (C)2007,JPO&INPIT |
