FLOW RATE MEASUREMENT ELEMENT AND MICRO FLOW PASSAGE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a flow rate measurement element and a flow passage device provided with a structure excellent in mechanical strength.

SOLUTION: The flow rate measurement element 10 is provided with the substrate 29 comprising: the micro flow passage 9 in which the liquid (a) flows; the optical waveguide 15 provided with an end 15a and the other end 15b optically coupled with the first part 11 of the micro flow passage 9; the optical waveguide 17 provided with an end 17a and the other end 17b optically coupled with the second part 13; the optical waveguide 19 provided with an end 19a and the other end 19b optically coupled with the end 15a through the first part 11; and the optical waveguide 21 provided with an end 21a and the other end 21b optically coupled with the end 17a through the second part 13. In the 3rd part 49, the heater 51 is arranged for adjusting the temperature of the liquid (a). At the other ends of 15b and 17b the light source 23 and at the other end 19b the light detector 25, and at the other end 21b, the light detector 27 are optically coupled.

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