THIN FILM ELEMENT, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To prevent a thin film element from being broken by a fine crack produced in a cut end face of the thin film element. SOLUTION: A manufacturing method for thin film elements includes the steps of forming multiple thin film elements (15) coupled with one another over a single substrate (20); forming boundary regions (14) between the thin film elements (15) by etching or some other like method to separate the individual thin film elements (15); and cutting the substrate at the boundary regions (14) into the individual thin film elements (15). Thus, a fine crack produced in a cut end face of a thin film element is prevented from developing into it. COPYRIGHT: (C)2007,JPO&INPIT