摘要 |
PROBLEM TO BE SOLVED: To provide a fluorescent glass capable of being suitably used in optical parts for optical axis alignment or laser beam measuring devices such as a beam profiler, each having an optical system for measuring green fluorescence generated by irradiating a fluorescent glass with laser light in the ultraviolet region, such as an excimer laser, by improving the fluorescent characteristics of the glass by enhancing the excitation efficiency of a fluorescent medium. SOLUTION: The fluorescent glass contains Tb<SP>3+</SP>as the fluorescent medium and exhibits green fluorescence by ultraviolet excitation. The fluorescent glass contains F<SP>-</SP>as the anion and 5-25 mol% Tb<SP>3+</SP>and 0.05-10 mol% Ce<SP>3+</SP>, based on the total cation in the glass. COPYRIGHT: (C)2007,JPO&INPIT
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