发明名称 METHOD AND APPARATUS FOR CLEANING AND SURFACE CONDITIONING OBJECTS WITH PLASMA
摘要 A method and apparatus for cleaning and surface conditioning objects using plasma are disclosed. An embodiment of the method discloses providing a plurality of elongated dielectric barrier members, the members having inner electrodes connected therein, providing a plurality of blocking members within predetermined gaps between the elongated dielectric barrier members, introducing the objects proximate the elongated dielectric barrier members and blocking members, and producing a dielectric barrier discharge to form plasma between the objects and both members for cleaning at least a portion of the objects. An embodiment of the apparatus for cleaning objects using plasma discloses a plurality of elongated dielectric barrier members arranged adjacent each other and defining a predetermine gap therebetween, a plurality of inner electrodes, each contained within, and extending substantially along the length of, respective ones of the elongated dielectric barrier members, and a plurality of blocking members positioned between the elongated dielectric barrier members and within the predetermined gaps.
申请公布号 WO2006115542(A2) 申请公布日期 2006.11.02
申请号 WO2005US43036 申请日期 2005.11.28
申请人 CERIONX, INC.;HENSLEY, PAUL FREDRIC 发明人 HENSLEY, PAUL FREDRIC
分类号 B08B6/00;C23F1/00 主分类号 B08B6/00
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