| 摘要 |
An electrode head of an ion beam generator is provided to improve the density of an ion beam and to increase the lifetime of the ion beam generator by focusing ions to a center portion of a chamber body using an electromagnet. An electrode head comprises a chamber body(10) for extracting ions, a suppression electrode(20) at one side of the chamber body, a ground electrode(30) in the chamber body corresponding to the suppression electrode, and an electromagnet. The electromagnet(40) is connected to a predetermined portion between the ground electrode and the chamber body through a spacer to connect the ground electrode to the chamber body. A plurality of electromagnets are used for supporting stably the ground electrode.
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