ATHERMAL ARRAYED WAVEGUIDE GRATING MODULE AND THE MANUFACTURING METHOD THEREOF

摘要

A thermal-independent AWG module and a method of manufacturing the same are provided to improve a reflective loss by cutting an AWG chip at a certain angle to a tangential direction on the plane direction. An input waveguide sub-chip(6a) and an AWG(Arrayed Waveguide Grating) sub-chip are arranged on one aligning/coupling substrate(11) in an input slab waveguide(1). A temperature compensation bar(10) is fixed to the input waveguide sub-chip and the aligning/coupling substrate, respectively. Light entered from the input waveguide sub-chip varies the position of the AWG sub-chip on a cut surface of the slab waveguide according to the length variation of the temperature compensation bar. The input waveguide sub-chip and the substrate are closely contacted with each other mechanically by a resilient clip(14) or spring.