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发明名称
CLEANING COMPOSITION FOR REMOVING RESISTS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100640107(B1)
申请公布日期
2006.10.31
申请号
KR20030047193
申请日期
2003.07.11
申请人
发明人
分类号
H01L21/304;C11D7/08;C11D7/26;C11D7/32;C11D7/34;C11D7/50;C11D11/00;G03F7/42;H01L21/02;H01L21/311
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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