发明名称 |
Method and apparatus for optical film measurements in a controlled environment |
摘要 |
An optical probe (and method) for measuring a surface in an environment containing a first substance, includes a light source for transmitting a light onto an area of the surface to obtain a measurement, a source of the first substance including one of a fluid and a gas for displacing a second substance from an area of the surface receiving the light, and a measuring device for receiving the light being reflected from the surface and for determining a measurement of the surface based upon the reflected light.
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申请公布号 |
US7130038(B2) |
申请公布日期 |
2006.10.31 |
申请号 |
US20050216101 |
申请日期 |
2005.09.01 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LEBEL RICHARD J.;MAURER FREDRIK;SMITH, JR. PAUL H.;VAN KESSEL THEODORE G.;WICKRAMASINGHE HEMATHA K. |
分类号 |
G01N21/00;B08B5/02;B24B37/04;B24B49/12;G01N11/06;G01N21/15;G01N21/55 |
主分类号 |
G01N21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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