发明名称 Method of embedding semiconductor chip in support plate and embedded structure thereof
摘要 A method of embedding a semiconductor chip in a support plate and an embedded structure thereof are proposed. A first dielectric layer having a reinforced filling material is provided, and a semiconductor chip is mounted on the first dielectric layer. A support plate having an opening and a second dielectric layer having a reinforced filling material are provided. The first dielectric layer mounted with the semiconductor chip, the support plate, and the second dielectric layer are pressed together, such that the semiconductor chip is received in the opening of the support plate, and the dielectric layers fill in a gap between the semiconductor chip and the opening of the support plate. The reinforced filling material of the dielectric layers can maintain flatness and consistency of the semiconductor chip embedded in the support plate, and fine circuits can be fabricated on the support plate by build-up and electroplating processes.
申请公布号 US7129117(B2) 申请公布日期 2006.10.31
申请号 US20040008964 申请日期 2004.12.13
申请人 PHOENIX PRECISION TECHNOLOGY CORPORATION 发明人 HSU SHIH-PING
分类号 H01L21/48;H01L21/56;H01L23/31;H01L23/48 主分类号 H01L21/48
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