Method and apparatus for treating perfluorocompounds

摘要

In a PFC decomposing apparatus according to the present invention, PFC contained in a discharged gas is decomposed in catalyst cartridge 3 packed with a catalyst containing 80% Al₂O₃ and 20% NiO. The discharged gas containing acid gases as a decomposition gas is cooled in cooling chamber 6 and led to discharged gas washing column 13 , where the acid gases are removed. Mists of acid gases (SO₃ mists or NOx mists) entrained in the discharged gas are separed in cyclone 16 . Compressed air at about 0.1 Mpa is fed to ejector 24 through air feed pipe 56 . The interior of ejector 24 is brought into a negative pressure state by the compressed air to such the discharged gas from cyclone 16 and ejector. Ejector 24 can reduce a frequency of maintenance inspection, as compared with a blower.