发明名称 Metal/ceramic circuit board and method for producing same
摘要 A metal layer 12 of aluminum or an aluminum alloy is formed on at least one side of a ceramic substrate 10 , and a resist 14 having a predetermined shape is formed on the metal layer 12 . Then, an etchant of a mixed solution prepared by mixing ferric chloride with water without adding any acids is used for etching and removing an undesired portion of the metal layer 12 to form a metal circuit 12 on the at least one side of the ceramic substrate 10.
申请公布号 US7128844(B2) 申请公布日期 2006.10.31
申请号 US20040855182 申请日期 2004.05.27
申请人 DOWA MINING CO., LTD. 发明人 TSUKAGUCHI NOBUYOSHI;KOSAKA MICHIHIRO
分类号 H01L21/302;C23F1/20;H01L21/48;H01L23/13;H01L23/373;H05K1/02;H05K1/03;H05K1/09;H05K3/06 主分类号 H01L21/302
代理机构 代理人
主权项
地址