发明名称 |
Apparatus for detecting defect in circuit pattern and defect detecting system having the same |
摘要 |
Provided is an apparatus for detecting a defect of a circuit pattern which includes a resonator, a first power supply unit connected to one end of the resonator to apply power to the resonator, a probe connected to the other end of the resonator to contact one end of the circuit pattern, a second power supply unit connected to the other end of the circuit pattern to apply a voltage thereto, and a detection portion connected between the resonator and the probe to measure a voltage generated from the circuit pattern and generate a measurement voltage, and determine presence of a defect in the circuit pattern from the measurement voltage.
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申请公布号 |
US7129719(B2) |
申请公布日期 |
2006.10.31 |
申请号 |
US20040858166 |
申请日期 |
2004.06.01 |
申请人 |
SAMSUNG TECHWIN CO., LTD. |
发明人 |
JUNG BOO-YANG;HAN SEONG-YOUNG;KIM BRUCE |
分类号 |
G01R27/08;G01R31/02;G01R27/32;G01R31/28;H02P1/46 |
主分类号 |
G01R27/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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