发明名称 Delivery position aligning method for use in a transfer system and a processing system employing the method
摘要 A transfer system has a position aligning device, a mounting device, and a transfer mechanism having two pick. In a delivery position aligning method for use in a transfer system, a set of delivery position coordinates that defines an access point of each pick of the transfer mechanism is temporarily determined. Then, a set of delivery position coordinates of each pick of the transfer mechanism to the position aligning device is fixed, and parts of sets of delivery position coordinates of each pick of the transfer mechanism to devices other than the position aligning device are fixed. A position alignment object is transferred to the position aligning device via a transfer route passing an unfixed set of delivery position coordinates, and an amount of positional displacement thereof is calculated. The unfixed set of delivery position coordinates is corrected based on the amount of positional displacement, and fixed.
申请公布号 US7129147(B2) 申请公布日期 2006.10.31
申请号 US20050138421 申请日期 2005.05.27
申请人 TOKYO ELECTRON LIMITED 发明人 KUMAGAI MOTOHIRO;KONDOH KEISUKE
分类号 H01L21/76;B25J9/22;H01L21/00;H01L21/677;H01L21/68 主分类号 H01L21/76
代理机构 代理人
主权项
地址