Stage control method, a stage control system, and a semiconductor manufacturing equipment

摘要

A method of controlling a stage comprising: acquiring a first moving speed of the stage based upon position information from a laser interferometer for measuring a position of the stage; controlling the moving speed of the stage based upon the first speed; determining a second moving speed of the stage based upon the number of rotation of a motor for moving the stage; controlling the moving speed of the stage based upon the second moving speed; and acquiring a ratio of the second moving speed to the first moving speed based upon the first moving speed.