AN AUTO-REPLACEABLE APPARATUS FOR COLLECTING BYPRODUCTS AND THE CONTROLLING METHOD THEREOF IN EQUIPMENT PRODUCING SEMICONDUCTOR

摘要

An auto-replaceable apparatus for collecting a byproduct and a controlling method thereof in semiconductor manufacture equipment are provided to increase operating rate of a byproduct collecting apparatus and to improve productivity by using a plurality of trap units. A plurality of trap units(5) are arranged on a circumference of a vertical shaft. The trap units rotates to left and right between upper and lower plates(6,7). The vertical shaft passes through center portions of the upper and lower plates. The upper and lower plates keep a predetermined distance from each other. The upper and lower plates selectively connect byproduct inlet and outlet, cleaning water supply and exhausting pipes, and dry air supply and exhausting pipes to the trap units. A connecting and disconnecting unit(8) keeps air tightness between the upper and lower plates and the trap units. A servo motor(9) rotates the trap units in a predetermined angle in response to an output signal from a controller.