Shaped non-contact capacitive displacement sensorsfor measuring shaped targets

摘要

An improved non-contact capacitive displacement sensor that may be employed for accurately measuring small distances between the sensor (300) and shaped targets (308). The non-contact capacitive displacement sensor includes a probe having a sensor element and a guard element. The guard element substantially surrounds the sensor element. At least the sensor element {300) has a shape that substantially matches the shape of a target element (308).