Multi-layer spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby
摘要
申请公布号
SG126096(A1)
申请公布日期
2006.10.30
申请号
SG20060001841
申请日期
2006.03.21
申请人
ASML NETHERLANDS B.V.
发明人
BANINE VADIM YEVGENYEVICH;MOORS JOHANNES HUBERTUS JOSEPHINA;SJMAENOK LEONID AIZIKOVITCH;SALASHCHENKO NIKOLAY NIKOLAEVITCH
