PLASMA PROCESSING APPARATUS,申请号KR20030080252-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	KR100639076(B1)	申请公布日期	2006.10.27
申请号	KR20030080252	申请日期	2003.11.13
申请人		发明人
分类号	H05H1/46;B01J19/08;C23C16/26;C23C16/509;H01J37/32;H01L21/205;H01L21/3065	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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