| 摘要 |
A liquid droplet ejecting method, a liquid droplet ejecting apparatus, a thin film forming method, a thin film forming apparatus, and an electronic device are provided to reduce the adverse effect of viscosity even when using a highly viscoelastic material, thereby stably performing the dropping of liquid droplets. A negative pressure is generated in a cavity by applying a second voltage(Vch) with respect to a reference potential(Vc). Herein, the reference potential is higher than a predetermined potential(Vb) by a first voltage. The negative pressure in the cavity is maintained by a holding potential(Vh) during a predetermined time(Th). Herein, the holding potential is higher than the reference potential by the second voltage. An inside of the cavity is pressurized by applying a third voltage corresponding to a potential difference between the holding potential and the predetermined potential. The first voltage is 10 percents or less of the third voltage.
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