DRYING APPARATUS HAVING DRY CHAMBER FOR DRYING SUBSTRATE USED IN FLAT PANEL DISPLAY(FPD)

摘要

A drying apparatus having a dry chamber for drying a substrate used in a flat panel display is provided to improve throughput and product efficiency so as to decrease coat of fabricating the flat panel display. A dry chamber(30) dries a substrate used in a flat panel display. An upper plate of controlling fluid flow(40a) and a lower plate of controlling fluid flow(40b) are located upper or lower portion of the dry chamber respectively. A nozzle tips are formed through the upper plate and the lower plate of controlling fluid flow respectively. The substrate is loaded between the nozzle tips. Dry air is sprayed to the substrate by using an upper nozzle(35a) and a lower nozzle(35b). In the upper plate of controlling fluid flow and the lower plate of controlling fluid flow, the dry air which is sprayed by the upper and the lower nozzle and the fluid flow which is dried on the substrate are controlled so as to remove water existing on the substrate completely. The upper plate of controlling fluid flow and the lower plate of controlling fluid flow are proximate fluid flow control plates.