| 摘要 |
<p>Plasma processing method and system in which the irradiation quantity and irradiation area of an exciting species can be enlarged for the surface of an article to be processed, and the entire surface can be irradiated uniformly while enhancing the processing performance and efficiency significantly by suppressing loss of effective exciting species. Corona discharge is generated between the pointed end parts of discharge electrodes (4) disposed oppositely by applying a pulse voltage between them, and the surface of the article is processed by irradiating with an exciting species containing plasma generated by the corona discharge. A plurality of discharge units (13) each having a first electrode (11) and a second electrode (12) disposed oppositely are provided. One of the secondary-side terminals of a transformer (15) is connected with the first electrodes (11) of the plurality of discharge units (13) and the other of the secondary terminals of the transformer (15) is connected with the second electrodes (12) of the plurality of discharge units (13) through rectifiers so that corona discharge is generated alternately from the plurality of discharge units (13).</p> |
