| 摘要 |
PROBLEM TO BE SOLVED: To evaluate quantification and reproducibility of a beam profile of an electrostatic latent image by providing an electrostatic latent image formation device equipped with a charged particle beam scanning means and accepting a plurality of types of vacuum chamber devices and an electrostatic latent image measurement device. SOLUTION: This vacuum chamber device is allowed to be mounted to a plurality of types of vacuum chamber devices by providing one common vacuum stage mounting part 54 accepting the plurality of types of vacuum chamber devices, by providing a stage moving means on one-side surface of the common vacuum stage mounting part 54 and by bringing a vacuum device mounting intermediate member 52 into contact with the opposite-side surface thereof. One-side surface of the vacuum chamber device mounting intermediate member 52 accepting the plurality of types of vacuum chamber devices comes into contact with the common vacuum state mounting part 54; a drive means 64 and a structural body 70 are arranged on the other-side surface thereof; and the vacuum chamber device mounting intermediate member has an outline larger than that of the common vacuum state mounting part 54 and is formed into a double structure so as to set the vacuum chamber device mounting reference surface almost the same. COPYRIGHT: (C)2007,JPO&INPIT
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