| 摘要 |
PROBLEM TO BE SOLVED: To stably supply an extremely small amount of adhesive to an object to be bonded by bringing a transfer plate in face contact after the example of a transfer stage or a work as the object to be bonded, and preventing the transfer plate from biased contact. SOLUTION: A transfer unit includes a first process of forming an adhesive layer of a constant thickness onto a rotary stage by a squeegee, a second process of supplying the adhesive to the transfer unit with the transfer plate, and a third process of transferring the adhesive supplied to the transfer plate to the object to be bonded. The transfer unit of the transfer apparatus has a spherical joint and a lock mechanism. COPYRIGHT: (C)2007,JPO&INPIT
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