| 摘要 |
A micro ring optical resonator and a fabricating method thereof are provided to regulate a resonance wavelength of light output by controlling voltage applied to an electrode formed in a region except a region where optical connection between an optical waveguide and a ring-shaped optical waveguide is generated. In a micro ring optical resonator, a lower cladding layer(200) is formed at the upper part of a substrate(100). A first optical waveguide(310) and a second optical waveguide(330) are formed at the upper part of the lower cladding layer(200) to be separated from each other. A ring-shaped optical waveguide(350) is formed between the first optical waveguide(310) and the second optical waveguide(330). An intermediate cladding layer(300) is formed at the upper part of the lower cladding layer(200), surrounds the first optical waveguide(310), the second optical waveguide(330), and the ring-shape optical waveguide(350), and is made of material with a refractive index varying according to the change of an electric field. An upper cladding layer(400) is formed at the upper part of the middle cladding layer(300). Electrodes are formed between the substrate(100) and the lower cladding layer(200) and at the upper part of the upper cladding layer(400), and change the refractive index of the middle cladding layer(300). |
