| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a pressure roller for applying a polishing pad on the applying surface of the pad of upper and lower surface plates in a double-sided polishing device. <P>SOLUTION: The pressure roller 20 is composed of a cylindrical roller body 21 having the length more than or equal to the width of the applying surface of the annular pad of the upper and lower surface plates in the double-sided polishing device, a roller shaft 22 rotatably supporting the roller body 21, and locking parts 23a, 23b of both ends of the roller shaft 22. The roller body 21 is positioned in the radial direction of the surface plate with respect to the polishing device and can be mounted so as to abut on the polishing pad over the whole width by locking the locking parts 23a, 23b to the locking receiving part positioned at the inner and outer peripheral sides of the lower surface plate in the polishing device. <P>COPYRIGHT: (C)2007,JPO&INPIT |
