发明名称 BORON DIFFUSING MATERIAL AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a boron diffusing material which further extends a diffusible time after an oxidation treatment. <P>SOLUTION: The boron diffusing material is constituted by a ceramic sintered body in which there are contained Al<SB>2</SB>O<SB>3</SB>component, SiO<SB>2</SB>component and BN component. A total percentage content of the Al<SB>2</SB>O<SB>3</SB>component and the SiO<SB>2</SB>component is 20 to 80 mass%, a percentage content of the BN component is 20 to 80 mass%, a mole ratio of Al<SB>2</SB>O<SB>3</SB>/SiO<SB>2</SB>is 1.0 to 2.4, and an open pore ratio is 13 to 43%. Moreover, a method of manufacturing the boron diffusing material comprises the steps of carrying out a CIP forming of mixed powder including a mixture and/or a compound of 20 to 80 mass% containing the Al<SB>2</SB>O<SB>3</SB>component and the SiO<SB>2</SB>component in which the mole ratio of Al<SB>2</SB>O<SB>3</SB>/SiO<SB>2</SB>is 1.0 to 2.4, and a boron nitride of 20 to 80 mass%; and carrying out a sintering in non-oxidizing atmosphere. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006294964(A) 申请公布日期 2006.10.26
申请号 JP20050115440 申请日期 2005.04.13
申请人 DENKI KAGAKU KOGYO KK 发明人 NISHIKAWA MASATO;FUSHII YASUTO
分类号 H01L21/223;C04B35/10;C04B35/583 主分类号 H01L21/223
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