| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a frequency measuring method and a frequency measuring apparatus for a piezoelectric vibrating plate, which have good productivity and high reliability in measurement. <P>SOLUTION: First, the height of lower electrodes 31 to 38 is measured to obtain operation correction information. Then, a crystal vibrating plate Q is sucked from a parts feeder by a first transfer device and is successively transferred to the upper surface of the lower electrode 31 positioned in an installation station of an index table. In a measuring station S, a frequency measuring section is installed. Under the instructions of a control section, the operation correction information for the lower electrode 31 is read from a memory 71 first, and an upper electrode approaches the lower electrode by a moving distance on the basis of the operation correction information. The frequency of the crystal vibrating plate Q is measured in a noncontact manner. The crystal vibrating plate Q is transferred from a discharge station O to a storage box by a second transfer device. <P>COPYRIGHT: (C)2007,JPO&INPIT |
