发明名称 ATOMIC FORCE MICROSCOPE AND METHOD FOR FORMING ENERGY DISSIPATION IMAGE USING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an atomic force microscope forming an exact energy dissipation image, and also to provide a method for forming the energy dissipation image that uses the atomic force microscope. <P>SOLUTION: The atomic force microscope comprises: a cantilever 1 having a probe 20 for contacting with a sample 21; a vibrating means for impressing vibration on the cantilever 1; a vibration control means for controlling the vibrating means, according to the amplitude set value set; an amplitude detecting means 17 for detecting the amplitude value of the vibration of the cantilever 1; and an image forming means 19 for forming the energy dissipation image, on the basis of the vibration of the cantilever 1. Difference information, on the basis of a difference between the amplitude set value and the amplitude detection value detected by the amplitude detecting means, is fed back to the vibrating means. The cantilever 1 is vibrated by the vibrating means so that the cantilever 1 goes into its resonant state, and dissipation image of energy is formed by the image forming means 19, according to the difference information. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006292720(A) 申请公布日期 2006.10.26
申请号 JP20050348550 申请日期 2005.12.02
申请人 JEOL LTD 发明人 NAKAMOTO KEIICHI
分类号 G01B21/30;G01Q60/32 主分类号 G01B21/30
代理机构 代理人
主权项
地址