| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying system which can convey two or more substrates simultaneously by one robot without putting a substrate on a tray and conveying it. SOLUTION: The substrate conveying system 1 includes a tray 2 for supporting two or more wafers W, a stage 3 placed by two or more wafers W, a hand 4A for supporting two or more wafers W at the tip of an elastic multi-articulated arm 4B, and a substrate conveyance robot 4 for transferring collectively two or more wafers W between the tray 2 and the stage 3. The hand 4A and the tray 2 have the comb type shape engaged mutually, respectively, and further the mechanism (lifter pin) 32 for transferring two or more wafers W between hands 4A is formed in the stage 3. COPYRIGHT: (C)2007,JPO&INPIT
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