| 摘要 |
PROBLEM TO BE SOLVED: To improve sensitivity by enabling efficient transfer of an infrared ray (heat) to the hot contact of a thermocouple, concerning a thermopile type infrared sensor. SOLUTION: This sensor is equipped with a membrane film 4 formed on a silicon substrate having a diaphragm structure, the thermocouple 9 formed by connecting a poly-silicon film to an aluminum film 7 through a contact hole 8 of an insulating film 6 on the membrane film 4, a passivation film 10 for protecting the thermocouple 9, and an aluminum film 7a formed on a lower part of an infrared absorption film 11 formed on the passivation film 10. When an infrared ray enters the infrared absorption film 11, the temperature of a light receiving domain comprising a hollow part 2 and the infrared absorption film 11 is raised, and the heat is transferred to the aluminum film 7a. Since the transferred heat is transferred efficiently to the hot contact of the thermocouple 9 via the aluminum film 7a, a great gradient is generated in the temperature difference between the hot contact and a cold contact of the thermocouple 9, to thereby generate a great electromotive force. COPYRIGHT: (C)2007,JPO&INPIT
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