发明名称 Method for producing a polymer structure on a substrate surface
摘要 A method for producing a polymer structure on a patterning region of a substrate surface includes the steps of depositing an adhesion layer having a first polymer material onto the substrate surface, patterning the adhesion layer such that the first polymer material of the adhesion layer is removed in a first region and the first polymer material of the adhesion layer remains in a second region including the patterning region, depositing a polymer layer of a second polymer material onto the substrate surface and the adhesion layer and patterning the polymer layer such that the polymer structure forms in the second region.
申请公布号 US2006240643(A1) 申请公布日期 2006.10.26
申请号 US20060387055 申请日期 2006.03.22
申请人 INFINEON TECHNOLOGIES AG 发明人 FRANOSCH MARTIN;MECKES ANDREAS;OPPERMANN KLAUS-GUENTER
分类号 H01L21/30;H01L21/46 主分类号 H01L21/30
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