MANUFACTURING METHOD OF A CERAMIC MEMBRANE AND CERAMIC MEMBRANE THAT IS MADE BY IT MEMBRANE

摘要

The present invention relates to a method for manufacturing a porous ceramic membrane and a porous ceramic membrane manufactured thereby. The method comprises forming a pore h2 on a silicon substrate 1 according to a pattern formation method with light exposure technology and etching technology, depositing a ceramic-forming oxide powder 5' on the silicon substrate 1 using an aerosol deposition method so as to fill the pore h2 of the silicon substrate 1 with the ceramic-forming powder 5', and then thermally filling the silicon substrate 1 to form a ceramic 5. Thus, a foreign substance, such as fine dust, or a filtered substance, will not be inserted or deposited into the pore h2 of the silicon substrate 1, so that reduction in the filtering ability of the porous ceramic membrane will be prevented. Also, the strength of the porous ceramic membrane is improved, and damage to the ceramic 5, which can occur in the manufacturing of the porous ceramic membrane, is inhibited, leading to a great reduction in defect rates.