摘要 |
<p>A piezoelectric diaphragm member (21) has an aperture (25). Preferably the piezoelectric diaphragm (21) is a multi-layer composite which includes a piezoelectric wafer layer. In some embodiments, the aperture (25) in the piezoelectric diaphragm accommodates a diaphragm accessory or fixture. The diaphragm accessory or fixture is preferably inserted through the plural layers of the multi-layer composite piezoelectric diaphragm member, and as such has an accessory or fixture body suitably sized for snug (e.g., fluid-tight) insertion or adhesion into the diaphragm aperture. Within its periphery the accessory or fixture body can include a feature such as a valve (e.g., ball valve, duckbill, flapper valve) or a projection (e.g., a stud or standoff, for example). The projection of the fixture or accessory can be configured, arranged, or adapted to engage or actuate further apparatus. In other embodiments, the aperture (25) in the piezoelectric diaphragm (21) is selectively opened and closed by a closure member such as a valve flap (27) which acts in response to movement of the piezoelectric diaphragm (21).</p> |