WAFER MAPPING DEVICE AND LOAD PORT WITH THE DEVICE,申请号KR20047003899-传众专利搜索

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发明名称	WAFER MAPPING DEVICE AND LOAD PORT WITH THE DEVICE
摘要
申请公布号	KR100638539(B1)	申请公布日期	2006.10.26
申请号	KR20047003899	申请日期	2002.09.17
申请人		发明人
分类号	H01L21/67;H01L21/68;H01L21/00;H01L21/673;H01L21/677	主分类号	H01L21/67
代理机构		代理人
主权项
地址

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