| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface inspection apparatus for automatically optimizing apparatus conditions in a surface inspection. <P>SOLUTION: The apparatus conditions of the surface inspection apparatus are changed sequentially, the image data of an object to be inspected are captured sequentially, a plurality of image data are stored, prescribed processing is made to the plurality of image data for ranking the image data, the feature value of the plurality of image data is extracted each, and the plurality of image data are classified based on the feature value, thus setting apparatus conditions to final ones when acquiring candidate image data for each classification with image data at a higher rank as the candidate image data for each classification. <P>COPYRIGHT: (C)2007,JPO&INPIT |
