PLATE MEMBER, SUBSTRATE HOLDING DEVICE, EXPOSURE DEVICE AND METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate holding device capable of suppressing the ingress of a liquid to the rear face side of a substrate.

SOLUTION: A substrate holder PH includes: a first holding part PH1 holding a substrate P; an inner surface Tc of a plate member T facing the side face Pc of the substrate P held by the first holding part PH1 through a predetermined gap A and having liquid repellency; and a chamfered part C that is provided at the upper part of the inner surface Tc. The side face Pc of the substrate P is provided with a liquid-repellent region having liquid repellency. The chamfered part C is provided in such a manner as to face the liquid-repellent region of the substrate P held by the first holding part PH1.

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