METHOD FOR EVALUATING PERFORMANCE AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for evaluating performance of an exposure device with high precision.

SOLUTION: Only primary components such as a scaling component, an offset component and a rotary component included in the superposition error of a plurality of mark images included simultaneously in the exposure slit in a scanning exposure device are extracted as components related to the performance of the exposure device and other components are removed as components unrelated to the performance of the exposure device such as deformation of a wafer. An index value of variation in primary components is employed as the performance evaluation value of the exposure device.

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