发明名称 SYSTEM FOR RECOVERING MASK, AND RECOVERY METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To reliably perform a series of disposal operations including receiving a request from a client for disposing a mask; removing and disposing of the mask; verifying the disposal; and disclosing the disposal record to a client, by using a server. <P>SOLUTION: The mask-recovering system is configured the manner where a server 1 receives a request to dispose of a mask 6 from a client terminal 5 via a network relating to discontinuity of a lot, instructs a storage cabinet 2 to take out the mask 6, instructs a disposing means 3 to dispose of the mask 6, and discloses disposal verifying information from a disposal verifying means 4 to the client terminal 5; the storage cabinet 2 stores the mask 6; the disposing means 3 disposes of the mask, by crushing a mask pattern drawn on the mask 6 to an unreadable pattern; and the disposal verifying means 4 certifies that a client has verified that the mask has been crushed and has been disposed of. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006293284(A) 申请公布日期 2006.10.26
申请号 JP20050272254 申请日期 2005.09.20
申请人 FUJITSU LTD 发明人 SAKAMOTO KAZUTAKA;MORIO MASARU
分类号 G03F1/68;H01L21/027 主分类号 G03F1/68
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