PLASMAREAKTOR FÜR DIE PASSIVIERUNG EINES SUBSTRATES,申请号DE19986033436T-传众专利搜索

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发明名称	PLASMAREAKTOR FÜR DIE PASSIVIERUNG EINES SUBSTRATES
摘要
申请公布号	DE69833436(T2)	申请公布日期	2006.10.26
申请号	DE19986033436T	申请日期	1998.06.24
申请人	LAM RESEARCH CORP.	发明人	LEE, CHANGHUN;SINGH, VIKRAM;YANG, JACK
分类号	H01L21/302;H01L21/3213;H01J37/32;H01L21/02;H01L21/3065;H01L21/311	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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