| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillator capable of stabilizing discharge by remarkably decreasing a discharge start voltage and realizing a remarkable increase in laser output. SOLUTION: The laser oscillator includes a discharge tube filled with a laser gas, electrodes provided on both the discharge tube, and a high voltage power source for applying a high voltage between the electrodes. In the laser oscillator, the discharge tube is perforated, an auxiliary electrode is provided on the hole, and the auxiliary electrode is connected to any one of the electrodes via high resistance. COPYRIGHT: (C)2007,JPO&INPIT |
