| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing method of a mold for vulcanizing and molding a tire capable of forming stable plasma by improving a reaction gas jet route and an electrode structure and capable of achieving the shortening of a washing time and the efficient occurrence of plasma, and a washing apparatus therefor. SOLUTION: In a first embodiment, jet orifices 16a and 16b with a diameter of about 6 mm for jetting a reaction gas Q in parallel to an electrode table 2 between a plate-shaped electrode 5 and the contaminated surface Wx of a sector mold W are formed to the side surface 1a of a washing treatment tank 1 at two places and the positions of the jet orifices 16a and 16b are set to the side surface 1a of the washing treatment tank 1 corresponding to the central part in the vertical direction of the plate-shaped electrode 5. The inside of the washing treatment tank 1 is set so as to be kept in a vacuum atmosphere of 60-90 Pa by a vacuum means 13. The reaction gas Q is composed of a mixture of oxygen and carbon tetrafluoride and ejected into the washing treatment tank 1 so that the jet pressure of the reaction gas Q is 0.15 MPa and the flow rate thereof is 100 SCCM and 400 SCCM. COPYRIGHT: (C)2007,JPO&INPIT |
